| dc.contributor.author | dubreuil, robert | |
| dc.date.accessioned | 2018-06-12t17:41:15z | |
| dc.date.available | 2018-06-12t17:41:15z | |
| dc.date.created | 2017 | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | http://knowledgecommons.lakeheadu.ca/handle/2453/4168 | |
| dc.description.abstract | group iii-nitride (iii-n) semiconductors are of high interest due to their thermal and electrical properties. opposed to other iii-v group semiconductors iii-n semiconductors are hexagonal wurtzite structures that have a direct bandgap across the entire composition range. this wide bandgap range covers from the deep ultra-violet to the infrared region of the electromagnetic spectrum. this makes the iii-n semiconductor group ideal for leds, laser diodes and photodetectors.
this thesis presents an in-depth study to the growth of iii-nitrides on silicon carbide (sic) templates. due to the difficulty in growing bulk crystals for the iii-nitrides, non-native substrates must be used. because of this, there exists a lattice mismatch between the substrates and thin films grown on top. sic proves to be an ideal substrate as the lattice mismatch is around 3.5%. thin films of iii-n were grown upon commercially purchased sic templates using remote plasma enhanced metal organic chemical vapor deposition (rp-mocvd) in the 阿根廷vs墨西哥竞猜
semiconductor research lab. results were characterized using x-ray diffraction (xrd), atomic force microscope (afm), energy-dispersive x-ray spectroscopy (edx) and ramen spectroscopy. | en_us |
| dc.language.iso | en_us | en_us |
| dc.subject | group iii-nitride (iii-n) semiconductors | en_us |
| dc.subject | silicon carbide | en_us |
| dc.title | low temperature epitaxial growth of iii-nitride semiconductors on silicon carbide templates by remote plasma metal-organic chemical vapor deposition | en_us |
| dc.type | thesis | en_us |
| etd.degree.name | master of science | en_us |
| etd.degree.level | master | en_us |
| etd.degree.discipline | engineering : electrical & computer | en_us |
| etd.degree.grantor | 阿根廷vs墨西哥竞猜
| en_us |
